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Selecting the Chemical Filter to Improve Molecular Contamination at Cleanroom
Introduction of Long Term Function Confirmation's Testing Data
GIGASORB Specification ULPA Specification
Dimension 590x1080x100mm
GIGASORB 20mm x 3Layers
(A,L,C per 1layer )
Time 0. 037sec x 3
(0.11sec)
Frame Aluminum
Dimension
 610x1220x85mm
Efficiency >99.9995%
Media Boron Silicate Glass
Model Minipleate standard products
Inspection Scantest by Clean Silica


Structure of FFU
Introduction of Long Term Confirmation's Testing Data
Boron Concertation Trend Curve at Cleanroom
Introduction of Long Term Confirmation's Testing Data
Total Phosphorus Concentration Trend Curve at Cleanroom
Introduction of Long Term Confirmation's Testing Data
Ammonia Concentration Trend Curve at Cleanroom
Introduction of Long Term Confirmation's Testing Data
Total Organic Gas Concentration Trend Curve at Cleanroom
Introduction of Long Term Confirmation's Testing Data
Siloxane Quantitative Analysis Result at Cleanroom
(Installation Passing 3Years Later)
uĘg/m3

OutGas ULPA
Outflow Side		 GIGASORB
Outflow Side		 Quantitative
minimum
Siloxane
(D3~D6)		 0.07 0.12 0.04 0.01
DOP 0.02 0.15 0.02 0.01
DBP 0.03 0.03 0.01 0.01
TBP <0.01 0.01 <0.01 0.01

GIGASORB's Organic Components
Absorption Quantity(Installation 3Years Later )
Regarding to GIGASORB's Functions and Life against the Organic Substance
Cleanroom has many organic substances that are comparatively low boiling point, regarding to these components,the GIGASORB's elimination function and life result be not so good (Component whose retention time is below 10 minutes will not be absorbed by GIGASORB completely)
However the organic substances with high boiling point above 20 minutes' retention time would be practically by 1st layer as well as 2nd layer's mat of GIGASORB(After the 3rd layers,the components content can't be inspected)
Regarding to GIGASORB's Functions and Life against Ammonia and Boron
(For Low Concerntration Gas Elimination Function)
The first three years after installation,when the ammonia concentration in the inflow side is 0.73ug/m3,as the same time GIGASORB's in the outflow side is 0.09ug/m3 and eliminated efficiency maintaining partically 90%.
The first three years after installation,when the boron concentration in the inflow side is 0.054ug/m3,as the same time GIGASORB's in the outflow side is 0.009ug/m3 and eliminated efficiency maintaining above 80%.


Wafer Exposure Test at Cleanroom(Reference Data)
Chemical Filter
GIGASORB's lifecycle,are divided into
26months and 36months atrticles
Exposure
Condition		 Silicone wafer exposure
24Hrs for 26 months		 Silicone wafer exposure
16,25,43Hrs for 36 months
Analysis's
Preliminary
processing
 Heating in high purity
inactive gas
(300oC,30minutes)
After separation,it will
be condensed on
individual absorbent		 Heating in high purity
inactive gas
(400oC,37minutes)
After separation,it will
be condensed on
individual absorbent
Analysis
Method
GC-MS

Contents 26Months ULPA FILTER
Outflow Reference(ng/cm2)		 GIGASORB
Outfolw(ng/cm2)
Trimethylsianol < 0.5 < 0.5
Hexamethyldisiloxane < 0.5 < 0.5
Hexamethylcyclotrisiloxane(D3) < 0.5 < 0.5
Octamethylcyclotetrasiloxane(D4) < 0.5 < 0.5
Decamethylcyclopentasiloxane(D5) < 0.5 < 0.5
Dedecamethylcyclohexasiloxane(D6) < 0.5 < 0.5
(TBP) < 0.2 < 0.2
(TECH) 5.6 < 0.2
(DOP) 19 4.0

Contents 36Months
ULPA FILTER Outflow Reference(ng/cm2)
16hr 25hr 43hr
GIGASORB Outfolw
(ng/cm2)
16hr 25hr 43hr
Trimethylsianol
< 0.01 < 0.01 < 0.01
< 0.01 < 0.01 < 0.01
Hexamethyldisiloxane
< 0.01 < 0.01 < 0.01
< 0.01 < 0.01 < 0.01
Hexamethylcyclotrisiloxane(D3)
< 0.01 < 0.01 < 0.01
< 0.01 < 0.01 < 0.01
Octamethylcyclotetrasiloxane(D4)
< 0.01 < 0.01 < 0.01
< 0.01 < 0.01 < 0.01
Decamethylcyclopentasiloxane(D5)
< 0.01 < 0.01 < 0.01
< 0.01 < 0.01 < 0.01
Dedecamethylcyclohexasiloxane(D6)
< 0.01 < 0.01 < 0.01
< 0.01 < 0.01 < 0.01
(TBP)
< 0.010 < 0.015 < 0.076
< 0.01 < 0.01 < 0.01
(TECH)
0.87 1.2 4.2
< 0.05 < 0.09 < 0.12
(DOP)
3.0 3.6 5.8
2.7 3.7 6.0

<<Products Catalogue---Please download PDF data sheet>>
GIGASORB :Data sheet
TAIWAN NITTA FILTER CO., LTD.
Head office : Chia Hsin Building 10 Fl., Room No. 1005, 96 Chung Shan N. Rd., Sec. 2, Taipei, Taiwan, R. O. C.
 TEL :+886-2-2581-6296 FAX :+886-2-2563-4900
Factory : 2-1, Industrial 2nd Rd, Pinchen Industrial Park, Taoyuan. Taiwan. R.O.C.
 TEL :+886-3-469-7551 FAX :+886-3-469-0260
http://www.nitta.com.tw