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Low Boron & Low Organic Compounds Air Filter
| LB: |
Low Boron |
| LO: |
Low Organic Compounds |
| LL: |
Low Boron & Low Organic Compounds |
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In the road map of the semiconductor technology, where the design rule of the device becomes the area of 0.13 um or less, a molecular pollution measures in addition to past particle pollution measure are needed.
Taiwan Nitta builds a molecular pollution measures in preparation for the request in the age, and it is high, and low boron and low organic compounds Filter are commercialized and has already built a lot of delivery results of reliability in a Japanese market by accumulation the material technology and the molecular pollution evaluation technology.
It is insufficient in next generation`s clean room though the Shiroki San pollution measures, the DOP pollution abatement, and the organic phosphorus pollution measures have already been completed in past standard goods on a molecular pollution measures.
A molecular pollution measures form Filter assumed for a lot of material surface areas to exist in the material used for a clean room are problems of the pressing need for next generation`s clean room. The LB-LO product is a product which reduces the pollution generation from the material to the utmost limit.
Especially, the boron polluted by measure of the high boiling point organism which influences the process of the semiconductor and the air introduction, ammonia, and an acid gas measures can be completely controlled by combining the LB-LO product and the chemical filter.
Panel Type
Standard HEPA Filter
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Model
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Depth
(mm)
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Face Velocity
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Pressure
Drop(Pa)
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Efficiency
(at 0.3µm)
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Safety Standards
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UL900
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FM4920
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| LB3502 |
52
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0.5
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120
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99.99%
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---
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O
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0.85
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210
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99.97%
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| LB3402 |
68
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0.5
|
95
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99.99%
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---
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O
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0.85
|
165
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99.97%
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| LB3802 |
86
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0.5
|
80
|
99.99%
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---
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O
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0.85
|
140
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99.97%
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| LL3502 |
52 |
0.5 |
125
|
99.97%
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---
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---
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| LL3402 |
68 |
0.5 |
100
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99.99%
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---
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---
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| LO3501 |
52 |
0.5 |
140
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99.99%
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---
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---
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| 0.85 |
250
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| LO3401 |
68 |
0.5 |
110
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99.99%
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---
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---
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| 0.85 |
200
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| LO3801 |
86 |
0.5 |
90
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99.99%
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---
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---
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| 0.85 |
160
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| LL3501 |
52 |
0.5 |
140
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99.99%
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---
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O
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| 0.85 |
250
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| LL3401 |
68 |
0.5 |
110
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99.99%
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---
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O
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| 0.85 |
200
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| LL3801 |
86 |
0.5 |
90
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99.99%
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---
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O
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| 0.85 |
160
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*UL900 & FM4920 product is optional.
Panel Type
Standard ULPA Filter
|
Model
|
Depth
(mm)
|
Face Velocity
|
Pressure
Drop(Pa)
|
Efficiency
(at 0.3µm)
|
Safety Standards
|
|
UL900
|
FM4920
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| LB3542 |
52
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0.5
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170
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99.999%
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---
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O
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| LB3442 |
68
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0.5
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135
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99.999%
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---
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O
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| LB3842 |
86
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0.5
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110
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99.999%
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---
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O
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0.85
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190
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| LO3541 |
52 |
0.5 |
200
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99.999%(5N)
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CLASS 2
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O
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| LO3441 |
68 |
0.5 |
145
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99.9995%(5N5)
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CLASS 2
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O
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| 0.85 |
250
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99.999%(5N)
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| LO3841 |
86 |
0.5 |
125
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99.9995%(5N5)
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CLASS 2
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O
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| 0.85 |
215
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99.999%(5N)
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| LL3541 |
52 |
0.5 |
200
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99.999%(5N)
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CLASS 2
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O
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| LL3441 |
68 |
0.5 |
145
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99.9995%(5N5)
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CLASS 2
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O
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| 0.85 |
250
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99.999%(5N)
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| LL3841 |
86 |
0.5 |
125
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99.9995%(5N5)
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CLASS 2
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O
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| 0.85 |
215
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99.999%(5N)
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*UL900 & FM4920 product is optional.
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| 2.Boron Emission Test Results |
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3. Project
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Decreasing organic outgas from air filter .
Decreasing organic out-gas from materials.
Evaluation: Measurement of organic deposition on wafer
Target value <1ng/cm2
(Requirement by customers)
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4. Outgas Test of Materials
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Test Equipment and Conditions
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Equipment |
TCT (Termal desorption Cold Trap Injector)
 Model CP-4020 GL-Science
Auto-Sampler
Model TMD-253H GL-Science
GC-MS
Model MD-800 Thermo-quest
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Conditions
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TCT
Desorption Temp.80~150°C, 10min
Injector Temp.250°C
Cold trap Temp.-130°C
GC-MS
Culumn TC-1 0.25µm, 60mx0.25mm
Temp.40°C, 5min---10°C/min, 280°C, 21min
Equivalent to Toluene
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| 5. Outgas Test Results |
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Organic Outgas from Materials Decreased.
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6.Wafer Test for Filter Evaluation
(Organic deposition on wafer) |
Test Equipment and Condition
Wafer Silicon 8inch Equipment
Wafer Thermal Description - GC
- Mass (WTD-GC-MS)
In He Gas Temp.400°C
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7. Wafer Test Results
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