* Filter Leak Test
 
1. Automatic Scanning System


2. Designated Liak Sizes for Various Efficiency of Filter
Filter Type
Efficiency at Paritcle Size Range
Leak Percentage Criteria of Scanning Test
HEPA
99.97%(0.300 to 0.399 µm)
 Less 0.03%
HEPA
99.99%(0.300 to 0.399 µm)
 Less 0.01%
ULPA
99.999%(0.102 to 0.199 µm)
 Less 0.001%
ULPA
99.9995%(0.102 to 0.199 µm)
 Less 0.001%
ULPA
99.9999%(0.102 to 0.199 µm)
 Less 0.0005%
ULPA
99.99995%(0.102 to 0.199 µm)
 Less 0.0005%
ULPA
99.999995%(0.102 to 0.199µm)
 Less 0.0005%


3. Constrast of Atmospheric Dust with Clean Slica Dust Concentration
Element
Al
Ka
Ca
Na
Fe
Cu
Ma
Pu
Cl
P
S
Atmospheric Dust (µg/m3)
0.88
0.52
0.78
0.4
1.1
0.033
0.88
0.52
 0.78
0.4
1.1
Clean Slica Dust (µg/m3)
< 0.005
< 0.005
< 0.005
< 0.01
< 0.005
< 0.005
---
---
 < 0.001
---
---

 
4. Clean Slica & DOP
According the result of measurement by Slica particles,
correlation calculated with DOP.


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