Chemical Filter

GIGASORBTM, it's designed in three dimensional filament structure with solid BAC (Beads shaped Activated Carbon), aiming at low pressure drop hence high efficient.The property of GIGASORBTM is better fit to make best clean room environment for super fine processing of LSI.

內容

Selecting the Chemical Filter to Improve Molecular Contamination at Cleanroom

Introduction of Long Term Function Confirmation's Testing Data

Structure of FFU

Introduction of Long Term Confirmation's Testing Data Boron Concertation Trend Curve at Cleanroom

Introduction of Long Term Confirmation's Testing Data Total Phosphorus Concentration Trend Curve at Cleanroom

Introduction of Long Term Confirmation's Testing Data Ammonia Concentration Trend Curve at Cleanroom

Introduction of Long Term Confirmation's Testing Data Total Organic Gas Concentration Trend Curve at Cleanroom

Introduction of Long Term Confirmation's Testing Data Siloxane Quantitative Analysis Result at Cleanroom

(Installation Passing 3Years Later)       u g/m3   OutGas ULPA Outflow Side GIGASORB Outflow Side Quantitative minimum Siloxane (D3~D6) 0.07 0.12 0.04 0.01 DOP 0.02 0.15 0.02 0.01 DBP 0.03 0.03 0.01 0.01 TBP <0.01 0.01 <0.01 0.01

GIGASORB's Organic Components Absorption Quantity(Installation 3Years Later )

Regarding to GIGASORB's Functions and Life against the Organic Substance

Cleanroom has many organic substances that are comparatively low boiling point, regarding to these components,the GIGASORB's elimination function and life result be not so good (Component whose retention time is below 10 minutes will not be absorbed by GIGASORB completely)

However the organic substances with high boiling point above 20 minutes' retention time would be practically by 1st layer as well as 2nd layer's mat of GIGASORB(After the 3rd layers,the components content can't be inspected)

Regarding to GIGASORB's Functions and Life against Ammonia and Boron (For Low Concerntration Gas Elimination Function)

The first three years after installation,when the ammonia concentration in the inflow side is 0.73ug/m3,as the same time GIGASORB's in the outflow side is 0.09ug/m3and eliminated efficiency maintaining partically 90%.

The first three years after installation,when the boron concentration in the inflow side is 0.054ug/m3,as the same time GIGASORB's in the outflow side is 0.009ug/m3and eliminated efficiency maintaining above 80%.

Wafer Exposure Test at Cleanroom(Reference Data)

Chemical Filter GGIGASORB's lifecycle,are divided into 26months and 36months atrticles Exposure Condition Silicone wafer exposure 24Hrs for 26 months Silicone wafer exposure 16,25,43Hrs for 36 months Analysis's Preliminary processing Heating in high purity inactive gas (300oC,30minutes) After separation,it will be condensed on individual absorbent Heating in high purity inactive gas (400oC,37minutes) After separation,it will be condensed on individual absorbent Analysis Method GC-MS

Contents 26Months ULPA FILTER Outflow Reference(ng/cm2) GIGASORB Outfolw(ng/cm2) Trimethylsianol <0.5 <0.5 Hexamethyldisiloxane <0.5 <0.5 Hexamethylcyclotrisiloxane(D3) <0.5 <0.5 Octamethylcyclotetrasiloxane(D4) <0.5 <0.5 Decamethylcyclopentasiloxane(D5) <0.5 <0.5 Dedecamethylcyclohexasiloxane(D6) <0.5 <0.5 (TBP) <0.2 <0.2 (TCEP) 5.6 <0.2 (DOP) 19 4.0

Contents 36Months ULPA FILTER Outflow Reference(ng/cm2) GIGASORB Outfolw (ng/cm2) 16hr 25hr 43hr 16hr 25hr 43hr Trimethylsianol <0.01 <0.01 <0.01 <0.01 <0.01 <0.01 Hexamethyldisiloxane <0.01 <0.01 <0.01 <0.01 <0.01 <0.01 Hexamethylcyclotrisiloxane(D3) <0.01 <0.01 <0.01 <0.01 <0.01 <0.01 Octamethylcyclotetrasiloxane(D4) <0.01 <0.01 <0.01 <0.01 <0.01 <0.01 Decamethylcyclopentasiloxane(D5) <0.01 <0.01 <0.01 <0.01 <0.01 <0.01 Dedecamethylcyclohexasiloxane(D6) <0.01 <0.01 <0.01 <0.01 <0.01 <0.01 (TBP) <0.010 <0.015 <0.076 <0.01 <0.01 <0.01 (TCEP) 0.87 1.2 4.2 <0.05 <0.09 <0.12 (DOP) 3.0 3.6 5.8 2.7 3.7 6.0

GIGASORB : 
Data sheet