Boron Free, Low Boron and Low Organic Compounds Air Filter

LB / LO/ LL HEPA / ULPA LB / LO/ LL ULPA The media use low boron / low organic compounds glass fiber paper. PTFE PTFE FILTER use super micro fiber polymer media, it has the low pressure drop and high efficiency performance. Due to it's fluorocarbon polymers characterics, it's boron free.

內容

In the road map of the semiconductor technology, where the design rule of the device becomes the area of 0.13 um or less, a molecular pollution measures in addition to past particle pollution measure are needed.
Taiwan Nitta builds a molecular pollution measures in preparation for the request in the age, and it is high, and low boron and low organic compounds Filter are commercialized and has already built a lot of delivery results of reliability in a Japanese market by accumulation the material technology and the molecular pollution evaluation technology.
It is insufficient in next generation`s clean room though the Shiroki San pollution measures, the DOP pollution abatement, and the organic phosphorus pollution measures have already been completed in past standard goods on a molecular pollution measures.
A molecular pollution measures form Filter assumed for a lot of material surface areas to exist in the material used for a clean room are problems of the pressing need for next generation`s clean room. The LB-LO product is a product which reduces the pollution generation from the material to the utmost limit.
Especially, the boron polluted by measure of the high boiling point organism which influences the process of the semiconductor and the air introduction, ammonia, and an acid gas measures can be completely controlled by combining the LB-LO product and the chemical filter.

1.Filter Type

Panel Type Low Boron & Low Organic Compounds HEPA Filter

Model	Depth(mm)	Face Velocity(m/s)	Pressure Drop(Pa)	Efficiency(0.3um)	Safety Standards UL900
LB3502	52	0.5 / 0.85	120 / 210	99.99% / 99.97%	---
LB3402	68	0.5 / 0.85	95 / 165	99.99% / 99.97%	---
LB3802	86	0.5 / 0.85	80 / 140	99.99% / 99.97%	---
LL3502	52	0.5	125	99.97%	---
LL3402	68	0.5	125 / 100	99.99%	---
LO3501	52	0.5 / 0.85	140 / 250	99.99%	---
LO3401	68	0.5 / 0.85	110 / 200	99.99%	---
LO3801	86	0.5 / 0.85	90 / 160	99.99%	---
LL3501	52	0.5 / 0.85	140 / 250	99.99%	---
LL3401	68	0.5 / 0.85	110 / 200	99.99%	---
LL3801	86	0.5 / 0.85	90 / 160	99.99%	---

* UL900 product is optional.

Panel Type Low Boron & Low Organic Compounds ULPA Filter

Model	Depth(mm)	Face Velocity(m/s)	Pressure Drop(Pa)	Efficiency(0.1~0.2um)	Safety Standards UL900
LB3542	52	0.5	170	99.999%	---
LB3442	68	0.5	135	99.999%	---
LB3842	86	0.5 / 0.85	110 / 190	99.999%	---
LO3541	52	0.5	200	99.999%	V
LO3441	68	0.5 / 0.85	145 / 250	99.9995% / 99.999%	V
LO3841	86	0.5 / 0.85	125 / 215	99.9995% / 99.999%	V
LL3541	52	0.5	200	99.999%	V
LL3441	68	0.5 / 0.85	145 / 250	99.9995% / 99.999%	V
LL3841	86	0.5 / 0.85	125 / 215	99.9995% / 99.999%	V

* UL900 product is optional.

Cell Type Boron Free PTFE HEPA Filter

Model	Dimension(mm)	Airflow(CMM)	Pressure Drop(Pa)	Efficiency(0.3um)	Safety Standards UL900
U150X-12	595x595x292	43.8	190	99.995%	---
U150X-06	290x595x292	18.5	190	99.995%	---

Panel Type Boron Free PTFE HEPA Filter

Model	Depth(mm)	Face Velocity(m/s)	Pressure Drop(Pa)	Efficiency(0.3um)	Safety Standards UL900
TNNE30H	52	0.5	98	99.999%	V
TNNE35H	52	0.5	85	99.999%	V

Panel Type Boron Free PTFE ULPA Filter

Model	Depth(mm)	Face Velocity(m/s)	Pressure Drop(Pa)	Efficiency(0.1~0.2um)	Safety Standards UL900
TNNA35U6	52	0.5	116	99.99995%	V
TNNA40U6	52	0.5	102	99.99995%	V
TNNA50U6	86	0.5	82	99.99995%	V

2.Boron Emission Test Results

3.Project

Decreasing organic outgas from air filter.
Decreasing organic out-gas from materials.
Evaluation: Measurement of organic deposition on wafer
Target value <1ng/cm2
(Requirement by customers)

4.Outgas Test of Materials

Test Equipment and Conditions

5.Outgas Test Results

Organic Outgas from Materials Decreased.

6.Wafer Test for Filter Evaluation
(Organic deposition on wafer)

Test Equipment and Condition

7.Wafer Test Results